I've recently developed and fabricated a high sensitivity bulk-micromachined MEMS capacitive accelerometer with the following mechanical characteristics:
1- mechanical sensitivity: 100pF/g
2- Full range: 2g (meaning that the variable capacitance that should be read along the full acceleration range is 200 pF)
3- Reference capacitance (at rest); 100pF
4- resonant frequency 100 Hz
5- I need very low electrical noise circuit as this accelerometer is designed for micro gravity measurements.
6- open loop single ended capacitive accelerometer
7- The circuit should be able to detect capacitance change in the range of 10's aF
I'm actually not familiar in designing the appropriate readout circuit but I found iSensor MEMS accelerometer subsystems provided by AD and Evaluation boards, but I don't know which one I should select.
Could please guide me in choosing the right readout circuit or any general advice.