Do you have any data for Acoustic Waves Rectification in MEMS Gyroscopes? I just would like to estimate acoustic wave impact on MEMS gyroscopes performance.
Sorry we don't have any data on this. You would have to calculate or measure the vibration level induced by the acoustic waves (in the PCB or the gyro package). Then you can estimate the rectification using the spec in Table 1.
In the cases that I have worked, the primary threat associated with acoustic energy comes from the response of the overall mechanical system. In other words, the resulting vibration on the platform, which the MEMS sensor is attached to, tends to be the point of impact, not the sensor's response to the actual acoustic energy itself. Using the linear-g parameter, filtering and the vibration profile (g^2/Hz vs frequency), one can project a response of the gyroscopes to estimate performance impact.
Hope that helps!
Thank you Venkat and Mark for your responses a lot.
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