Can AD654 used an capacitor to frequency converter? that is to fix Vin, instead, to change capacitance( several pF ), is it feasible?
the AD654 cannot be used as a capacitance to frequency converter. Analog Devices do manufacture capacitance to digital converters, the output being a 16 or 24-bit digital value that corresponds to the capacitance on the input. I suggest you review these parts. Two such parts are the AD7745 or AD7746.
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