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ADXL312 operating principle

Question asked by Erik-TU on Aug 28, 2012
Latest reply on Aug 28, 2012 by Kevin.G

Hello,

The datasheet of the ADXL312 say (page 10: THEORY OF OPERATION): "Deflection of the structure is measured using differential capacitors that consist of independent fixed plates and plates attached to the moving mass. Acceleration deflects the beam and unbalances the differential capacitor, resulting in a sensor output whose amplitude is proportional to acceleration."

 

Does this mean that the ADXL works as a piezoelectric or a piezoresistive acceleration sensor?

 

Thanks in advance!

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