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HMC4069 damaged: Short circuit between Vcc and ground

Category: Hardware
Product Number: HMC4069
During the application of the HMC4069 device, short circuits between VCC and GND have occurred twice. Meanwhile, the impedance of other pins has decreased by an order of magnitude.
Both failures happened after the device had been working stably for about half a year. I have inspected the power supply, control signals, as well as RF input and output signals, and all parameters meet the design specifications.
Could you please advise the potential root causes of this issue?
The relevant schematic diagram is attached below.

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