My sensor have capacitance from 142 to 168 pF diapason, maximal supply voltage <12 AC, alternating signal without DC bias . Measurement frequency 10 kH.
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Question: RE: waht analog devices equpment i can apply for design capacitive humidity sensor with 0..10V analog output signal by LucaV
Analog Devices Capacitance to Digital converters already include the excitation circuit.
Depending on the capacitance range you can use it as is or follow the example of CN0129 to extend the range.