assuming that it's a
closed-loop pendulus accelerometer with capacitive pickoff?
The ADXL203/AD22037 are dual-axis accelerometers containing a polysilicon
surface-micro-machined sensor and signal conditioning circuitry to implement
open-loop acceleration measurement architecture. The AD22037 is a capacitive
accelerometer. The capacitive pickup is formed by a large number of fingers
extending from the proof mass. As the fingers move between the fixed plates
(forming differential capacitors) capacitance change is detected.