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AD22302 fourth generation i-MEMs : sensor axes orthogonal ?

What is the difference between MEMs and i-MEMs ? In the datasheet of the AD22300 serie Automotive i-MEMs, it describes those accelerometers as derivative products of the fourth generation ADXL78 family surface micromachined i-MEMS accelerometers. How many generations have been existed before today, at which maximum generation are we arrived today and what are their differences ? The AD22302 has 2 orthogonal axes (90°) to each other and in the plane of the ship. What exactly ? What is the real error of alignment between X and Y, and what about the alignment error with the package (with the Z axe) ?