AD22302 fourth generation i-MEMs : sensor axes orthogonal ?

What is the difference between MEMs and i-MEMs ? In the datasheet of the AD22300 serie Automotive i-MEMs, it describes those accelerometers as derivative products of the fourth generation ADXL78 family surface micromachined i-MEMS accelerometers. How many generations have been existed before today, at which maximum generation are we arrived today and what are their differences ? The AD22302 has 2 orthogonal axes (90°) to each other and in the plane of the ship. What exactly ? What is the real error of alignment between X and Y, and what about the alignment error with the package (with the Z axe) ?

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    •  Analog Employees 
    on Aug 13, 2014 8:12 PM

    Hi Didier,

    i-MEMS is an ADI proprietary process of integrating sensor and electronics on the same die.  We have recently moved away from that for some of our products.  So today our products are a mix of integrated and discrete (sensor and electronics) dies.

    Irrespective of the fabrication process used, all the relevant performance parameters (for customers) are listed in Table 1 of our datasheet.

    The X and Y alignment is 0.1 deg (typical) and the Z axis tilt is +/-1deg.