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ADIS16467 Recommended for New Designs
The ADIS16467 is a precision, microelectric mechanical system (MEMS), inertial measurement unit (IMU) that includes a triaxial gyroscope and a triaxial...
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ADIS16467 on Analog.com

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ADIS16467 Helium Susceptibilities?

RelSpace on Oct 6, 2025

Category: Hardware

Product Number: ADIS16467

Hello,

I'm trying to find information on the ADIS16467 IMUs and their respective vulnerabilities to prolonged Helium exposure? There are known susceptibilities w/ He ingress affecting MEMS tuning fork structures, leading to a change in Q factor and/or device resonance. I've been unable to find any information on He effects from product documentation, so would appreciate any insight that can be shared here.

MEMS oscillator frequency increase from helium – zmatt.net

iPhone 8+ in Helium rich atmosphere

Kind Regards,

David

MarioSM

on Oct 7, 2025 4:36 AM
0
Hello RelSpace thanks for posting. I will circle with my colleagues about the hermetic sealing and other details from this part and come back with feedback.

regards,

Mario SM
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NevadaMark

on Oct 8, 2025 8:47 AM
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Thank you for posting this question. Generally speaking, the primary point of vulnerability on inertial MEMS sensors comes through the MEMS cap (die level). We are also aware of the risk that persistent helium exposure presents and have a strategy for mitigating this risk. Some elements of this strategy are proprietary but can be discussed under NDA. Are you working with anyone in our sales channel?
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RelSpace on Oct 8, 2025 11:37 AM in reply to NevadaMark
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Hey Mark, appreciate the follow-up and understood on the sensitivities here. Are we able to take this to a private channel and I can elaborate on NDA status?
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