ADXL203/AD22037 Structure

Document created by analog-archivist Employee on Feb 23, 2016
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I would like to use a AD22037 accelerometer in a prototype, am I correct in
assuming that it's a
closed-loop pendulus accelerometer with capacitive pickoff?


The ADXL203/AD22037 are dual-axis accelerometers containing a polysilicon
surface-micro-machined sensor and signal conditioning circuitry to implement
open-loop acceleration measurement architecture. The AD22037 is a capacitive
accelerometer.  The capacitive pickup is formed by a large number of fingers
extending from the proof mass. As the fingers move between the fixed plates
(forming differential capacitors) capacitance change is detected.